MET ONE 3411 Portable Air Particle Counter

As surface geometry for storing massive amounts of data has dramatically decreased, particle monitoring for microelectronics manufacturers has become increasingly important. MET ONE 3411 portable air particle counters are designed to meet the unique demands of semiconductor cleanroom monitoring, process benchmarking and particle troubleshooting applications.

Portable air particle counter for ISO 14464 cleanroom verification in ISO 1 and 2 environments.

  • 0.1 micron sensitivity (range 0.1 μm-1.0 μm)
  • Sequential sampling with optional collector
  • Fan inactive during operation to minimize particle impact
  • Simplified interface for area, location & operating parameter configuration/replication

Explore MET ONE 3411 Models



  • ISO 14644-1 Class 5 compliant sampling

Data Management

  • Wireless, Ethernet, Serial & USB communication
  • Printed or paperless data output
  • Open communication architecture


  • Up to 6 particle size channels (2.83 LPM flow rate (0.1 CFM)
  • Sequential sampling capability
  • Long-life laser technology for improved performance & lower operating costs


  • Semiconductor cleanroom classification & monitoring
  • Continuous environmental monitoring
  • Process troubleshooting

Product Specifications

Performance ISO 21501-4 unit-to-unit accuracy & reproducibility
Industry Standards 21 CFR Part 11, ISO 14644-1:2015, FCC, CE
Light Source Helium neon laser
Coincidence Loss % at 1,765,000 particles/m³ (per ISO 21501-4 method)
Sample Volume 5 µm
Throughput 28.32 L per minute
Reporting EU GMP, ISO 146441-1.2015, FS209E, BS5295, ISO 14644-1:1999
Count Alarms Display and Cycles User-defined alarm counts, Raw counts: N/CF, N/CM, N/L in cumulative or differential mode
Item Specifications Referenced 2088800-02

Content and Resources

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Certified Calibration Services for MET ONE Calibration services flyer about audit-quality calibrations for your MET ONE air particle counter
MET ONE 3411 PORTABLE AIRBORNE PARTICLE COUNTER Introducing the MET ONE 3411 0.1 micron sensitivity portable airborne particle counter. Unlike many particle counters the MET ONE 3411 fan remains off when operating in a standard semiconductor cleanroom environment, thus particle generation is virtually eliminated.
MET ONE 3411 Air Particle Counter Brochure Brochure for the MET ONE 3411 air particle counter
Optimizing Workflow Efficiency of Cleanroom Routine Environmental Monitoring Whitepaper by author Tony Harrison, a Compliance and Applications Specialist for Beckman Coulter Life Sciences | Published 2017

Technical Documents